DC2-NPGS (DesignCAD)
The Nanometer Pattern Generation System (NPGS) is a Scanning Eletron Microskope (SEM ) lithography system. The objective for NPGS is to provide a powerful, versatile, and easy to use system for doing advanced electron beam lithography or ion beam lithography using a commercial SEM (Scanning Electron Microscope), STEM (Scanning Transmission Electron Microscope), FIB (Focused Ion Beam), dual beam (SEM/FIB), or Helium Ion microscope. It is shiped with a software DesignCAD, which produces the required input data. The associated file format is DC2. However the NPGS system just uses a subset of possible entities.
The LayoutEditor can read and write the DC2 format. The supported entities are identical to the entities supported by the NPGS, so that generated files can directly used and existing files can be checked on its appearance after exposure.
(introduced with version 20130729)
DC2-NPGS file format
The DC2-NPGS file format does not support hierarchy. So a flat copy of the current drawing is saved. Also text elements are not supported and not saved. DC2-NPGS files are ASCII text files mostly using numbers. Here is an example of an DC2-NPGS file:
0 0 0 0 0 42 20 0 0 0 0 1000 0 0 0 3 16 0 0 1 0 0 1 example2.vfn 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 1 1 0 0 0 0 0 0 0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 21 0 0 0 0 0 1 4 1 0 0 10 0 1 0 255 0 0 0 1 -4000 -30000 -2000 -58000 18000 -56000 4000 -48000 21 1 0 0 0 0 1 5 1 0 1 10 0 1 0 255 0 0 10 1 7000 1000 7000 -15000 25000 -15000 25000 1000 7000 1000 21 6 0 0 0 0 1 5 1 0 1 10 0 1 0 255 0 0 10 1 13950 -37990 13950 -38000 13970 -38000 13970 -37990 13950 -37990 1 5 1 0 1 10 0 1 0 255 0 0 10 1 29950 -53990 29950 -54000 29970 -54000 29970 -53990 29950 -53990 1 5 1 0 1 10 0 1 0 255 0 0 10 1 19950 -37990 19950 -38000 19970 -38000 19970 -37990 19950 -37990 1 5 1 0 1 10 0 1 0 255 0 0 10 1 11950 -25990 11950 -26000 11970 -26000 11970 -25990 11950 -25990 1 5 1 0 1 10 0 1 0 255 0 0 10 1 13950 -24990 13950 -25000 13970 -25000 13970 -24990 13950 -24990 1 5 1 0 1 10 0 1 0 255 0 0 10 1 33950 -8990 33950 -9000 33970 -9000 33970 -8990 33950 -8990 1 5 1 0 1 10 0 1 0 255 0 0 10 1 32950 -15990 32950 -16000 32970 -16000 32970 -15990 32950 -15990